Das ist realisierbar durch direkte Einspeisung des Signals am Messobjekt mittels koaxialer RF-Sonden mit passendem Pitch ( 75-1250 µm ) sowie Vergleichsmessungen ( Kalibrierungen ) gegen bekannte Standards ( Abb. 2 ).
Nicht standardisierte Konfigurationen werden mit Hilfe des sogenannten „ imperfectly known on-wafer standards “ kalibriert, welcher typischerweise in Verbindung mit dem Messobjekt selbst hergestellt wird.
www.enas.fraunhofer.deThis can be realized through feeding the signal directly to the device under test via coaxial RF probes with matching pitch ( 150-1250 microns ) as well as comparative measurements ( calibrations ) according to known standards.
Non-standard configurations are calibrated using the so-called " imperfectly known on-wafer standards “, which is typically manufactured in connection with the device itself.
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